poly depletion metal gate
Thiseffectiscalledpolysilicondepletion.Itleadstoareducedelectronconcentrationattheinterfaceandcausesaneffectiveincreaseofthedielectric ...,1)Polysilicondepletionlowersthegatecapandincreasestheeffectiveelectricalthicknessofthegateinsulator.2)Quant...
高介電係數閘極介層技術
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串接了一個PolyDepletion電容,使得等.效閘極電容變...Dualgatestructure(metal-N,metal+poly-P)...2001/10/9CharteredGateStructure/ProcessDummySiNgate/high ...
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